Journal of Sensors / 2016 / Article / Fig 8

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Figure 8

Drift characteristics of deposited TiO2 thin films (a) substrate heating temperature at room temperature and (b) substrate heating temperature at 200°C toward pH variations between pH 4 and pH 12.
(a)
(b)

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