Journal of Sensors / 2016 / Article / Fig 9

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Figure 9

EGFET temperature experimental simulation of TiO2 thin films deposited at (a) room temperature and (b) 200°C and ISFET temperature experimental simulation of TiO2 thin films deposited at (c) room temperature and (d) 200°C toward pH variations between pH 4 and pH 12.
(a)
(b)
(c)
(d)

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