EGFET pH Sensor Performance Dependence on Sputtered TiO₂ Sensing Membrane Deposition Temperature

Figure 9

EGFET temperature experimental simulation of TiO₂ thin films deposited at (a) room temperature and (b) 200°C and ISFET temperature experimental simulation of TiO₂ thin films deposited at (c) room temperature and (d) 200°C toward pH variations between pH 4 and pH 12.

(a)

(b)

(c)

(d)