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Journal of Sensors
Volume 2016, Article ID 7594531, 9 pages
http://dx.doi.org/10.1155/2016/7594531
Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

1NANO-Electronic Centre (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia
2Core of Frontier Materials & Industry Applications, Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia
3Faculty of Electrical Engineering, Universiti Teknologi MARA, 40450 Shah Alam, Selangor, Malaysia

Received 27 April 2016; Accepted 11 July 2016

Academic Editor: Sang Sub Kim

Copyright © 2016 Khairul Aimi Yusof et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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