Journal of Sensors / 2016 / Article / Tab 1

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Table 1

RF magnetron sputtering conditions of TiO2 thin films.

ParametersConditions 1Conditions 2

Substrate heating temperature (°C) Room temperature200
RF power (W)300300
Working pressure (mTorr)55
Gas flow rate (Ar : O2 sccm)50 : 150 : 1
Deposition time (min)55

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