EGFET pH Sensor Performance Dependence on Sputtered TiO₂ Sensing Membrane Deposition Temperature

Table 3

Output tolerance voltage of TiO₂ thin films deposited at room temperature and 200°C toward pH variations between pH 4 and pH 12 for EGFET and ISFET temperature experimental simulation.

pH	EGFET		ISFET
	Output tolerance voltage of TiO2 thin films deposited at
	Room temperature (mV/°C)	200°C (mV/°C)	Room temperature (mV/°C)	200°C (mV/°C)
4	0.12043	0.35536	1.7642	1.9817
7	0.29524	0.35754	1.5881	1.8976
10	0.10839	0.35838	1.5973	1.9473
12	0.24868	0.49907	1.5808	1.7671