Journal of Sensors / 2016 / Article / Tab 3

Research Article

EGFET pH Sensor Performance Dependence on Sputtered TiO2 Sensing Membrane Deposition Temperature

Table 3

Output tolerance voltage of TiO2 thin films deposited at room temperature and 200°C toward pH variations between pH 4 and pH 12 for EGFET and ISFET temperature experimental simulation.

pHEGFET ISFET
Output tolerance voltage of TiO2 thin films deposited at
Room temperature (mV/°C)200°C (mV/°C)Room temperature (mV/°C)200°C (mV/°C)

40.120430.355361.76421.9817
70.295240.357541.58811.8976
100.108390.358381.59731.9473
120.248680.499071.58081.7671

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