Research Article

Short-Time Fourier Transform and Decision Tree-Based Pattern Recognition for Gas Identification Using Temperature Modulated Microhotplate Gas Sensors

Figure 1

The photos of microhotplate gas sensor arrays. (a) SEM photo of a four-element gas sensor array. Each sensor element is a square freestanding membrane supported by four arms. A tungsten thin film resister is embedded in the membrane acting as both heater and thermometer. The SnO2 sensitive film is sputtered on the top of the microhotplate. (b) Microhotplate gas sensors packaged with DIP16 or TO5.
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