Principle Research on a Novel Piezoelectric 12-DOF Force/Acceleration Sensor

Table 6

Modal analysis data.

Rank	Natural frequency (Hz)	Vibrational mode
1	12,970	The linear vibration of the shell along the x-axis
2	12977.4	The linear vibration of the shell along the y-axis
3	19661.7	The bending vibration of the lower part of the shell along the bisector of the positive x- and y-axis
4	19676.7	The bending vibration of the lower part of the shell along the bisector of the positive x-axisand the negative y-axis
5	21005.3	The linear vibration of the shell along the z-axis
6	21412.2	The rotational vibration of the lower part of the shell along the z-axis
7	27467.3	The reverse linear vibration of the upper and lower part of the shell along the z-axis
8	27709.7	The bending vibration of the shell along the y-axis
9	27772.3	The bending vibration of the shell along the x-axis
10	28833.6	The same rotational vibration of the upper and lower part of the shell along the z-axis
11	35022.5	The reverse rotational vibration of the upper and lower part of the shell along the z-axis
12	35,654	The reverse bending vibration of the upper and lower part of the shell along the bisector of the positive x-axis and the negative y-axis