Journal of Sensors / 2017 / Article / Fig 1

Research Article

Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications

Figure 1

Schematic of grating structure fabricated in sol-gel silica waveguide by using the nanoimprint method. The sol-gel silica core was deposited on the SiO2-Si substrate, following which the grating structure was nanoimprinted on the sol-gel silica core.