Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer

Figure 10

Comparison of the frequency control waveform between the optimized system and the conventional system: (a) the frequency control waveform of the optimized system in the first 200.0 ms, (b) the frequency control waveform of the conventional system in the first 200.0 ms, (c) the partial magnified frequency control waveform of the optimized system in the last 200.0 ms, and (d) the partial magnified frequency control waveform of conventional system in the last 200.0 ms.

(a)

(b)

(c)

(d)