Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer

<div>The control precision of the frequency with different effective bits of AD and DA convertors: (a) the resolution change of the AD converter with the effective bits of 16 in the DA convertor; (b) the resolution change of the DA converter with the effective bits of 18 in the AD convertor.</div>

Journal of Sensors

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Figure 4

Figure 4: Digital Closed-Loop Driving Technique Using the PFD-Based CORDIC Algorithm for a Biaxial Resonant Microaccelerometer 