An Analytical Model for Bandwidth Enhancement of Air-Coupled Unsealed Helmholtz Structural CMUTs

Table 2

Parameters of CMUT cells in our design.

Parameters	Double	Standard	Half
R membrane radius [µm]	1000	500	250
h cavity height [µm]	60	30	15
t membrane thickness [µm]	20	10	5
aini initial hole radius [µm]	110	55	27.5
a hole radius [µm]	40, 80, 120, 160, 200	20, 40, 60, 80, 100	10, 20, 30, 40, 50
tins insulator layer thickness [µm]	6	3	1.5
r1 hole position [µm]	750	375	187.5
nhole holes number	4	4	4
Vdc DC voltage [V]	6720	3360	1680