Research Article
An Analytical Model for Bandwidth Enhancement of Air-Coupled Unsealed Helmholtz Structural CMUTs
Table 2
Parameters of CMUT cells in our design.
| Parameters | Double | Standard | Half |
| R membrane radius [µm] | 1000 | 500 | 250 | h cavity height [µm] | 60 | 30 | 15 | t membrane thickness [µm] | 20 | 10 | 5 | aini initial hole radius [µm] | 110 | 55 | 27.5 | a hole radius [µm] | 40, 80, 120, 160, 200 | 20, 40, 60, 80, 100 | 10, 20, 30, 40, 50 | tins insulator layer thickness [µm] | 6 | 3 | 1.5 | r1 hole position [µm] | 750 | 375 | 187.5 | nhole holes number | 4 | 4 | 4 | Vdc DC voltage [V] | 6720 | 3360 | 1680 |
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