Journal of Sensors / 2019 / Article / Fig 1

Research Article

Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Figure 1

The SON process. (a) Top view of initial trenches, (b) cross-section view of initial trenches, (c) cross-section view after 10 min annealing, (d) cross-section view after 15 min annealing, and (e) cross-section view after 20 min annealing.

(a) Top view of initial trenches
(b) Cross-section view of initial trenches
(c) Cross-section view of trenches annealed by 10 min
(d) Cross-section view of trenches annealed by 15 min
(e) Cross-section view of trenches annealed by 20 min

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