Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

<figure class="figure-group responsive"><div class="sub-figure" id="a"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.001a.svgz" name="5408268.fig.001a" type="image/svg+xml"></object><div class="fig-label">(a) Top view of initial trenches</div></div><div class="sub-figure" id="b"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.001b.svgz" name="5408268.fig.001b" type="image/svg+xml"></object><div class="fig-label">(b) Cross-section view of initial trenches</div></div><div class="sub-figure" id="c"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.001c.svgz" name="5408268.fig.001c" type="image/svg+xml"></object><div class="fig-label">(c) Cross-section view of trenches annealed by 10 min</div></div><div class="sub-figure" id="d"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.001d.svgz" name="5408268.fig.001d" type="image/svg+xml"></object><div class="fig-label">(d) Cross-section view of trenches annealed by 15 min</div></div><div class="sub-figure" id="e"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.001e.svgz" name="5408268.fig.001e" type="image/svg+xml"></object><div class="fig-label">(e) Cross-section view of trenches annealed by 20 min</div></div></figure>

<p>The SON process. (a) Top view of initial trenches, (b) cross-section view of initial trenches, (c) cross-section view after 10 min annealing, (d) cross-section view after 15 min annealing, and (e) cross-section view after 20 min annealing.</p>

Journal of Sensors

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Figure 1: Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology 