Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

<figure class="figure-group responsive"><div class="sub-figure" id="a"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.006a.svgz" name="5408268.fig.006a" type="image/svg+xml"></object><div class="fig-label">(a) Cross-section</div></div><div class="sub-figure" id="b"><object data="https://static.hindawi.com/articles/js/volume-2019/5408268/figures/5408268.fig.006b.svgz" name="5408268.fig.006b" type="image/svg+xml"></object><div class="fig-label">(b) Overview</div></div></figure>

<p>Schematic diagram of a piezoresistive pressure sensor.</p>

Journal of Sensors

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Figure 6

Figure 6: Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology 