Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Figure 9

Fabrication process of a piezoresistive barometric pressure sensor.

(a) Grow oxide and pattern

(b) Trench etch

(c) Form SON cavity and grow epitaxy

(d) Grow oxide 500-1500A

(e) Piezoresistor implantation

(f) Contact implantation

(g) Deposit oxide and SiN and open contact

(h) Deposit Al and pattern