Research Article

Fabrication of a Piezoresistive Barometric Pressure Sensor by a Silicon-on-Nothing Technology

Figure 9

Fabrication process of a piezoresistive barometric pressure sensor.

(a) Grow oxide and pattern
(b) Trench etch
(c) Form SON cavity and grow epitaxy
(d) Grow oxide 500-1500A
(e) Piezoresistor implantation
(f) Contact implantation
(g) Deposit oxide and SiN and open contact
(h) Deposit Al and pattern