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Journal of Sensors
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2019
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Article
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Fig 11
/
Review Article
Design Approaches of MEMS Microphones for Enhanced Performance
Figure 11
The cross-sectional view of a corrugated diaphragm with (a) multicorrugations in the diaphragm [
107
] and (b) a single deep corrugation in the diaphragm [
110
].
(a)
(b)