Design Approaches of MEMS Microphones for Enhanced Performance

Figure 15

Microphone designs from different companies: in (a, b), the spring-supported diaphragm microphones for stress relief have been presented by Analog Devices [147] and Bosch [150]. (c) is a MEMS microphone design presented by Knowles [151], which has a free-floating diaphragm for reducing the stress, thereby increasing the sensitivity. (d) shows a microphone design from Infineon [65], which has the highest SNR compared to the other designs presented in Table 1. (e) shows ST’s dual-channel MEMS microphone design for higher dynamic range [157].

(a)

(b)

(c)

(d)

(e)

(f)

(g)