Designing a High-Precision AC Current Source to Measure the nm-Scale Displacements in Mechanical Systems

Table 2

Performances of the source VCCS.

f = 100 kHz					1.3 MΩ(D = 0.04 mm) < Zprobe(D) < 2 MΩ(D = 0.06 mm)
	Rprobe = 100kΩ		Rprobe = 600kΩ
	V1 = 14.9 V		V1 = 4.9 V
Op amp	TL081	OP249	OPA657	OPA655
G	240	240	3	3
	0.145	0.145	2.073	2.073
	0.28	0.28	4	4
	0.024	0.021	0.0025	0.0148
Sprobe(mV/μm)	3.32	3.32	47.5	47.5