A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

<div>The transient responses of the mode-matching system: (a) output voltage curve of the preamplifier, (b) output voltage curve of LPF, (c) output voltage curve of PI, (d) different frequency splits between pilot tones and the drive mode, (d) sense mode dynamics with different quality factors, (f) pilot tones with different amplitude ratio, and (g) system stability comparison in different simulation parameters (<span class="nowrap"><svg height="11.927pt" id="M147" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 64.9236 11.927" width="64.9236pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 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Journal of Sensors

fig11

Figure 11

Figure 11: A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope 