A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

<div>The prototype of the mode-matching MEMS gyroscope: (a) overall experimental circuit of the mode-matching MEMS gyroscope and (b) internal interface circuit and vacuum packaging chip.</div>

Journal of Sensors

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Figure 15

Figure 15: A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope 