A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope

<div>The relationships between analytical solutions of critical values <span class="nowrap"><svg height="9.14241pt" id="M137" style="vertical-align:-3.1815pt" version="1.1" viewbox="-0.0498162 -5.96091 13.045 9.14241" width="13.045pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M615 290C615 392 563 448 529 448C511 448 491 441 484 434L483 425C518 400 546 349 546 273C546 158 504 46 417 46C381 46 356 77 356 142C356 184 380 293 392 334L387 340L307 323C305 288 296 228 287 188C265 94 221 52 180 52C144 52 112 89 112 171C112 278 164 372 241 430L226 454C106 394 23 288 23 155C23 40 79 -12 139 -12C184 -12 245 32 285 85C292 31 322 -12 376 -12C423 -12 470 18 501 45C570 104 615 184 615 290Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.969,3.132)"><path d="M389 0V32C297 38 291 46 291 118V635C234 613 175 595 109 583V556L161 554C203 552 207 547 207 497V118C207 46 201 38 110 32V0H389Z"></path></g></svg>,</span> <span class="nowrap"><svg height="14.1649pt" id="M138" style="vertical-align:-5.529pt" version="1.1" viewbox="-0.0498162 -8.6359 15.7447 14.1649" width="15.7447pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M620 667C620 684 593 710 552 710C515 710 459 687 409 634C360 582 334 506 320 433H247L215 400L220 388H310L259 80C224 -129 199 -161 185 -174C175 -183 160 -192 141 -192C123 -192 90 -181 75 -165C69 -158 64 -156 54 -164C39 -178 24 -195 24 -208C24 -231 61 -257 94 -257C124 -257 162 -243 209 -194C267 -134 303 -66 343 107C369 220 378 279 393 385L503 397L523 433H404C432 619 464 660 500 660C522 660 542 646 566 621C573 614 583 615 593 621C603 628 620 648 620 667Z"></path></g></svg>,</span> <span class="nowrap"><svg height="10.7866pt" id="M139" style="vertical-align:-2.150701pt" version="1.1" viewbox="-0.0498162 -8.6359 9.52083 10.7866" width="9.52083pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M699 368C699 549 574 666 407 666C186 666 23 488 23 277C23 113 129 -3 288 -13L307 -26C431 -111 501 -139 533 -147C559 -154 613 -163 658 -164L666 -141C597 -111 507 -66 430 -11L416 -1C580 42 699 190 699 368ZM601 371C601 227 518 54 381 22L354 40L278 24C175 47 120 145 120 269C120 451 235 631 398 631C540 631 601 521 601 371Z"></path></g></svg>,</span> and <span class="nowrap"><svg height="11.927pt" id="M140" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 12.4199 11.927" width="12.4199pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M250 606C250 634 233 656 203 656C168 656 146 618 146 593C146 564 169 545 192 545C227 545 250 573 250 606ZM227 95L212 119C187 98 152 71 135 71C129 71 128 78 134 102L207 373C219 418 217 451 194 451C165 451 92 411 30 351L44 326C77 353 106 371 114 371C124 371 121 357 117 341L55 97C32 5 46 -12 70 -12C108 -12 191 51 227 95Z"></path></g></svg>:</span> (a) the relationship between critical margins <svg height="11.927pt" id="M141" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 12.4199 11.927" width="12.4199pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M250 606C250 634 233 656 203 656C168 656 146 618 146 593C146 564 169 545 192 545C227 545 250 573 250 606ZM227 95L212 119C187 98 152 71 135 71C129 71 128 78 134 102L207 373C219 418 217 451 194 451C165 451 92 411 30 351L44 326C77 353 106 371 114 371C124 371 121 357 117 341L55 97C32 5 46 -12 70 -12C108 -12 191 51 227 95Z"></path></g></svg> and <svg height="14.1649pt" id="M142" style="vertical-align:-5.529pt" version="1.1" viewbox="-0.0498162 -8.6359 15.7447 14.1649" width="15.7447pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M620 667C620 684 593 710 552 710C515 710 459 687 409 634C360 582 334 506 320 433H247L215 400L220 388H310L259 80C224 -129 199 -161 185 -174C175 -183 160 -192 141 -192C123 -192 90 -181 75 -165C69 -158 64 -156 54 -164C39 -178 24 -195 24 -208C24 -231 61 -257 94 -257C124 -257 162 -243 209 -194C267 -134 303 -66 343 107C369 220 378 279 393 385L503 397L523 433H404C432 619 464 660 500 660C522 660 542 646 566 621C573 614 583 615 593 621C603 628 620 648 620 667Z"></path></g></svg> in different quality factors and (b) the relationship between critical value <svg height="11.927pt" id="M143" style="vertical-align:-3.291101pt" version="1.1" viewbox="-0.0498162 -8.6359 12.4199 11.927" width="12.4199pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M743 650H503L496 622L527 618C563 613 564 603 532 573C449 495 371 431 323 392C301 374 272 355 246 346L280 522C297 609 300 614 379 622L385 650H135L129 622C209 614 215 609 198 522L124 133C106 39 99 35 23 28L17 0H271L277 28C193 35 192 39 208 133L239 316C264 328 280 325 303 288C368 183 435 90 502 0H652L659 28C602 34 584 43 543 94C495 154 403 283 347 369L574 554C634 603 659 612 735 624L743 650Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,9.23,3.132)"><path d="M250 606C250 634 233 656 203 656C168 656 146 618 146 593C146 564 169 545 192 545C227 545 250 573 250 606ZM227 95L212 119C187 98 152 71 135 71C129 71 128 78 134 102L207 373C219 418 217 451 194 451C165 451 92 411 30 351L44 326C77 353 106 371 114 371C124 371 121 357 117 341L55 97C32 5 46 -12 70 -12C108 -12 191 51 227 95Z"></path></g></svg> and the frequency of calibration pilot tone <span class="nowrap"><svg height="9.14241pt" id="M144" style="vertical-align:-3.1815pt" version="1.1" viewbox="-0.0498162 -5.96091 13.045 9.14241" width="13.045pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M615 290C615 392 563 448 529 448C511 448 491 441 484 434L483 425C518 400 546 349 546 273C546 158 504 46 417 46C381 46 356 77 356 142C356 184 380 293 392 334L387 340L307 323C305 288 296 228 287 188C265 94 221 52 180 52C144 52 112 89 112 171C112 278 164 372 241 430L226 454C106 394 23 288 23 155C23 40 79 -12 139 -12C184 -12 245 32 285 85C292 31 322 -12 376 -12C423 -12 470 18 501 45C570 104 615 184 615 290Z"></path></g><g transform="matrix(.0091,0,0,-0.0091,7.969,3.132)"><path d="M389 0V32C297 38 291 46 291 118V635C234 613 175 595 109 583V556L161 554C203 552 207 547 207 497V118C207 46 201 38 110 32V0H389Z"></path></g></svg>.</span></div>

Journal of Sensors

fig9

Figure 9

Figure 9: A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope 