Research Article
A Digital Mode-Matching Control System Based on Feedback Calibration for a MEMS Gyroscope
| | Parameter | Value | Parameter | Value |
| | Proof mass of the drive structure (kg) | | Structure thickness (μm) | 80 | | Stiffness of the drive structure (N/m) | 242.30 | Number of tuning combs | 92 | | Resonant frequency of the drive mode (Hz) | 3216 | Tuning comb gap (μm) | 4.4 | | Q-factor of the drive mode in standard atmospheric pressure | 120 | Tuning comb length (μm) | 180 | | Proof mass of the sense structure (kg) | | Quadrature correction comb gap (μm) | 4 | | Stiffness of the sense structure (N/m) | 342.21 | Quadrature correction comb length (μm) | 20 | | Q-factor of the sense mode in standard atmospheric pressure | 10 | Number of quadrature correction combs | 136 | | Resonant frequency of the sense mode (Hz) | 3251 | Mechanical parameter (N/(mV2)) | |
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