Research on “Cylinder-Four-Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td class="align_left">Material</td><td class="align_center">Density <svg height="9.39034pt" id="M93" style="vertical-align:-3.42943pt" version="1.1" viewbox="-0.0498162 -5.96091 7.13289 9.39034" width="7.13289pt" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink"><g transform="matrix(.013,0,0,-0.013,0,0)"><path d="M516 277C516 378 460 448 376 448C335 448 288 434 240 401C158 345 127 277 107 159C53 -161 38 -221 23 -247L28 -261C43 -260 95 -250 114 -226C122 -216 129 -199 146 -75C152 -29 157 0 164 31C182 9 206 -12 237 -12C267 -12 325 8 376 46C451 102 516 179 516 277ZM432 259C432 134 366 40 259 40C236 40 204 48 171 76L195 203C219 327 253 400 326 400C398 400 432 336 432 259Z"></path></g></svg> (kg/m<sup>3</sup>)</td><td class="align_center">Young’s modulus (10<sup>11</sup>N/m<sup>2</sup>)</td><td class="align_center">Poisson’s ratio</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td class="align_left">Si</td><td class="align_center">2330</td><td class="align_center">1.65</td><td class="align_center">0.278</td></tr><tr><td class="align_left">Rigid cylinder</td><td class="align_center">2320</td><td class="align_center">0.74</td><td class="align_center">0.17</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Journal of Sensors

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Table 2: Research on “Cylinder-Four-Beam” Microstructure Improvement of MEMS Bionic Vector Hydrophone 