Research Article
Direct Current Sputter Epitaxy of Heavily Doped p+ Layer for Monocrystalline Si Solar Cells
Figure 1
(a) Schematic fabrication process and cross-sectional structure of p+n SCs or p+nn+ SCs. (b) Cross-sectional structure of n+p SCs.
(a) p+nn+ SC |
(b) n+p SC |