Research Article

Depth-Sensitive Raman Investigation of Metal-Oxide-Semiconductor Structures: Absorption as a Tool for Variation of Exciting Light Penetration Depth

Figure 1

Schematic presentation of laser beam focused by microscope objective: : focal length, : working distance, 2: diameter of the focal spot, : half-angle of maximum cone of light collected by microscope objective, : entrance diameter of the objective, and , : coordinates.