Research Article

Raman Spectroscopy Characterization of Dissolved Polysilicon Byproduct SiCl4 in Ionic Liquids

Table 1

Ionic liquids used in the study.

Chemical nameAbbreviationStructure

1-Butyl-3-methylimidazolium trifluoromethanesulfonate[Bmim]OTf
1-Butyl-3-methylimidazolium bis[(trifluoromethyl)sulfonyl]imide[Bmim]NTf2
1-Hexyl-3-methylimidazolium bis[(trifluoromethyl)sulfonyl]imide[Hmim]NTf2
1-Octyl-3-methylimidazolium bis[(trifluoromethyl)sulfonyl]imide[Omim]NTf2