Abstract

Excimer lasers are powerful sources of radiation in the UV, providing several laser lines between 157 and 353 nm. The excimer laser transition is bound-free, and thus the emitted wavelengths are broad-band (up to 200 cm−1). In addition the high gain (0.15 cm−1) of the laser gas causes a rather large divergence (>1 mrad) in conventional excimer lasers.A new excimer laser concept is described which improves the spectral brightness in terms of watt/(rad × bandwidth) by three orders of magnitude. This allows, through non-linear processes such as Raman shifting the fundamental output and four-wave-mixing in gases, the generation of new laser lines in the UV and VUV.