Table of Contents
Laser Chemistry
Volume 11, Issue 1, Pages 13-30

Cars Diagnostic on a Photochemical Reactor for IR Laser Induced Production of Si and Si3N4 Powders

1ENEA, Dip. TIB, US Fisica Applicata, CRE Frascati, Rome C.P. 65-00044-Frascati, Italy
2Institute of Physics, Zemun, Serbia

Received 15 March 1990; Accepted 27 June 1990

Copyright © 1991 Hindawi Publishing Corporation. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


In a flow reactor a low power (up to 50 W) CW CO2 laser tuned at 944,19 cm−1 has been focussed in order to produce Si and Si3N4 ultrafine powders from SiH4 and SiH4/NH3 mixtures.

Among possible on-line optical diagnostics, two different CARS techniques have been used to monitor the excitation process and to measure average reaction temperatures in collinear geometry. In broad-band CARS at low resolution (≈6.0 cm−1) the reactant temperature is measured from the attenuation of the corresponding integrated peak intensity below and at the dissociation threshold. In narrow-band experiments the temperature reached by the dissociating reactants below and above the threshold is inferred from the spectral shape (measured with 0.2 cm−1 resolution) of the envelope of rovibrational CARS transitions involved.

Results obtained at the threshold for SiH4 dissociation are in agreement with previous data on gas-phase pyrolysis in a thermal process. For the SiH4/NH3 reaction the difficulty in obtaining stoichiometric Si3N4 has been related to the cooling effect of large NH3 addition to the SiH4 warmed up in the laser absorption.