140976.fig.002a
(a)
140976.fig.002b
(b)
Figure 2: Back side (a) and front side (b) of the modular PLD substrate heater (design and construction D. Natusch, Leipzig) for 3-inch diameter substrates, suitable for homogeneous double-sided deposition of oxide thin films. The active heater element is KANTHAL wire, embedded in alumina ceramic tubes. To reduce the temperature gradient to the substrate edge, an additional front side heater element is applied (not included in the photos).