Figure 29: ZnO(002) HR-XRD triple axis 2Θ−ω scans of a homoepitaxial Zn0.965Mg0.025P0.01O film E1917 (blue) and a Zn0.96Mg0.04O QW film E2000 (red) which exhibit compressive and tensile in-plane strain in the pseudomorphic growth mode, respectively. The total film thickness (calculated from the intensity oscillations) and the out-of-plane strain were 1,030 nm and 330 nm and 0.27% and −0.22% for E1917 (blue) and E2000 (red), respectively.