Figure 30: HR-XRD triple-axis reciprocal space maps (RSMs) of the asymmetric (104) reciprocal lattice points of films and substrates of the two homoepitaxial samples E1917 and E 2000 (compare Figure 29). In the center of the maps is the ZnO (104) substrate lattice point with higher intensity, and below or above is the weaker ZnMgO:P and ZnMgO (104) film lattice point. The perfect vertical alignment of (104) film and substrate peaks demonstrates the in-plane lattice match and the pseudomorphic growth mode.