Research Article

Adaptive Step-Size Control in Simulation of Diffusive CVD Processes

Table 1

Heuristic derivation of the control parameters (Nichols-Ziegler).

Controller 𝐾 𝑃 𝑇 𝑛 𝑇 𝑣

P 0 . 5 𝐾 𝑃 , c r i t
PI 0 . 4 5 𝐾 𝑃 , c r i t
PID 0 . 6 𝐾 𝑃 , c r i t