Research Article

Adaptive Step-Size Control in Simulation of Diffusive CVD Processes

Table 2

Derivation of the control parameters (Chien-Hrones-Reswick and Takahashi).

PID ( P O ) = 0 ( P O ) = 2 0 Takahashi

𝐾 𝑅 𝑡 0 . 6 𝑔 𝑡 𝑢 𝐾 𝑆 𝑡 0 . 9 5 𝑔 𝑡 𝑢 𝐾 𝑆 1 , 2 𝑡 𝑔 𝐾 𝑠 ( 𝑡 𝑢 + 𝑇 )
𝑇 𝑛 1 . 0 𝑡 𝑔 1 . 3 5 𝑡 𝑔 2 ( 𝑡 𝑢 + 𝑇 / 2 ) 2 𝑡 𝑢 + 𝑇
𝑇 𝑣 0 . 5 𝑡 𝑢 0 . 4 7 𝑡 𝑢 0 . 5 ( 𝑡 𝑢 + 𝑇 )