Modeling and Simulations of Collapse Instabilities of Microbeams due to Capillary Forces

Figure 6

The pull-in length of the doubly clamped microbeam as a function of the parameter (𝑑²ℎ³)^1/4 including the effect of mid-plane stretching.

(a) ℎ=1𝜇m and 𝑑 varies.

(b) 𝑑=1𝜇m and ℎ varies.