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Mathematical Problems in Engineering
/
2010
/
Article
/
Tab 12
/
Research Article
Model of PE-CVD Apparatus: Verification and Simulations
Table 12
Rate of concentration.
RATE
Si
C
source
,
max
:
Si
C
target
,
max
9
·
1
0
6
:
6.5
·
1
0
6
=
1.38