Research Article
Model of PE-CVD Apparatus: Verification and Simulations
Table 18
Computed (C) and experimentally fitted (F) parameters from UG simulations.
| | | | Ratio (SiC:C) | Computed Ratio |
| 400 | 900 | S. | F.1: 0.97 | 1.01 | 400 | 500 | S. | F.1.3: 1 | 1.33 | 400 | 100 | | C.2.4: 1 | | 600 | 300 | | C.1.5: 1 | | 800 | 500 | | C.1: 1 | | 800 | 900 | S. | F.1.18: 1 | 1.252 |
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