Model of PE-CVD Apparatus: Verification and Simulations

Table 18

Computed (C) and experimentally fitted (F) parameters from UG simulations.

$\mathrm{\hspace{0.17em}\hspace{0.17em}}\mathrm{\hspace{0.17em}\hspace{0.17em}}T\mathrm{\hspace{0.17em}\hspace{0.17em}}$	$\mathrm{\hspace{0.17em}\hspace{0.17em}}P\mathrm{\hspace{0.17em}\hspace{0.17em}}$	$\lambda$	Ratio (SiC:C)	Computed Ratio
400	900	S. $1/10·10^{-8}$	F.1: 0.97	1.01
400	500	S. $1/5·10^{-8}$	F.1.3: 1	1.33
400	100	$1/2·10^{-8}$	C.2.4: 1
600	300	$1/4·10^{-8}$	C.1.5: 1
800	500	$1/8·10^{-8}$	C.1: 1
800	900	S.$1/5.7·10^{-8}$	F.1.18: 1	1.252