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Mathematical Problems in Engineering
/
2010
/
Article
/
Tab 26
/
Research Article
Model of PE-CVD Apparatus: Verification and Simulations
Table 26
Rate of concentration.
RATE
Si
C
source
,
max
:
C
target
,
max
1.8
·
1
0
7
:
2.2
·
1
0
7
=
0.81