Model of PE-CVD Apparatus: Verification and Simulations

Table 31

Rate of concentration.

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RATE

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${\text{C}}_{\text{source},\max \hspace{0.17em}}:\text{Si}{\text{C}}_{\text{target},\max \hspace{0.17em}}$

$5·10^6:4.4·10^6=1.13$

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