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Mathematical Problems in Engineering
/
2010
/
Article
/
Tab 33
/
Research Article
Model of PE-CVD Apparatus: Verification and Simulations
Table 33
Rate of concentration.
RATE
C
source
,
max
:
Si
C
target
,
max
1.8
·
1
0
7
:
0.75
·
1
0
7
=
2.4