Model of PE-CVD Apparatus: Verification and Simulations

Table 8

Solver methods and their parameters.

Solver	BiCGstab (Bi conjugate gradient method)
Preconditioner	Geometric Multi-grid method
Smoother	Gauss-Seidel method as smoothers for the Multi-grid method
Basic level	$0$
Initial grid	Uniform grid with $2$ elements
Maximum Level	$6$
Finest grid	Uniform grid with $8192$ elements