A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="586718.fig.001a" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.001a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Side view of the microplate</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="586718.fig.001b" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.001b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Top view of the microplate</td></tr></table></td></tr></table>

<table>A schematic drawing of an electrically actuated microplate under the effect of squeeze film damping.</table>

Mathematical Problems in Engineering

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Figure 1

Figure 1: A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping 