A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="586718.fig.003a" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.003a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Amplitude response</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="586718.fig.003b" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.003b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Phase response</td></tr></table></td></tr></table>

<table>Comparisons of the frequency response obtained by the wavelet Galerkin method, the Blech model and the experimental data of Veijola et al. [<a href="/journals/mpe/2010/586718/#B26">26</a>].</table>

Mathematical Problems in Engineering

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Figure 3: A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping 