A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="586718.fig.004a" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.004a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>The real part of the pressure distribution</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="586718.fig.004b" src="https://static.hindawi.com/articles/mpe/volume-2010/586718/figures/586718.fig.004b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>The imaginary part of the pressure distribution</td></tr></table></td></tr></table>

<table>The air film pressure distribution calculated by the wavelet interpolation Galerkin method.</table>

Mathematical Problems in Engineering

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Figure 4

Figure 4: A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping 