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Mathematical Problems in Engineering
Volume 2010, Article ID 586718, 25 pages
http://dx.doi.org/10.1155/2010/586718
Research Article

A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

1School of Mechanical Engineering, Southeast University, Jiangning, Nanjing 211189, China
2College of Electronic Science and Engineering, Nanjing University of Posts and Telecommunications, Nanjing 210003, China

Received 29 March 2009; Revised 17 September 2009; Accepted 27 October 2009

Academic Editor: Stefano Lenci

Copyright © 2010 Pu Li and Yuming Fang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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