A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Table 3

The parameters of two torsion mirrors [27].

	Mirror 1	Mirror 2
Width of the mirror $l_y$	500 $\mu$m	500 $\mu$m
Length of the mirror $l_x$	500 $\mu$m	500 $\mu$m
Thickness of the mirror $h_{\delta }$	30 $\mu$m	30 $\mu$m
Density of the mirror $\rho$	2300 kg/m^3	2300 kg/m^3
Gap spacing $g_0$	28 $\mu$m	13 $\mu$m
Torsional natural frequency $f_n$	13092.56 Hz	12824.87 Hz