A Wavelet Interpolation Galerkin Method for the Simulation of MEMS Devices under the Effect of Squeeze Film Damping

Table 5

A comparison of quality factors obtained by Pan’s model, the wavelet interpolation Galerkin method and the finite difference method for mirror 2.

$p_0^{}\mathrm{\hspace{0.17em}\hspace{0.17em}}$(torr)	Pan’s model	The wavelet interpolation Galerkin method (error)	The finite difference method (error)
0.08	1.645$\mathrm{\hspace{0.17em}\hspace{0.17em}}\times \mathrm{\hspace{0.17em}\hspace{0.17em}}$10^4	1.679 $\times$ 10^4 (2.1%)	1.847 × 10^4 (12.3%)
0.10	1.268 × 10^4	1.297 × 10^4 (2.3%)	1.458 × 10^4 (15.0%)
0.50	2.135 × 10^3	2.208 × 10^3 (3.4%)	2.352 × 10^3 (10.2%)
1	8.919 × 10^2	9.195 × 10^2 (3.1%)	1.010 × 10^3 (13.2%)
3	2.681 × 10^2	2.712 × 10^2 (1.2%)	3.012 × 10^2 (12.3%)
6	1.282 × 10^2	1.318 × 10^2 (2.8%)	1.463 × 10^2 (14.1%)
10	8.004 × 10^1	8.118 × 10^1 (1.4%)	9.092 × 10^1 (13.6%)
30	3.461 × 10^1	3.599 × 10^1 (4.0%)	3.959 × 10^1 (14.4%)
60	2.574 × 10^1	2.628 × 10^1 (2.1%)	2.970 × 10^1 (15.4%)
100	2.255 × 10^1	2.278 × 10^1 (1.0%)	2.593 × 10^1 (15.0%)
760	1.820 × 10^1	1.900 × 10^1 (4.4%)	2.055 × 10^1 (12.9%)