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Mathematical Problems in Engineering
Volume 2012 (2012), Article ID 865461, 11 pages
Research Article

Dynamic Analysis of Cracked Cantilever, Electrostatic Microactuators Using Radial Basis Functions

Department of Electrical Engineering, National Penghu University of Science and Technology, Magong, Penghu, Taiwan

Received 10 July 2012; Revised 7 November 2012; Accepted 17 November 2012

Academic Editor: Slim Choura

Copyright © 2012 Ming-Hung Hsu. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


The dynamic problems of a microactuator with a single edge crack are numerically formulated using radial basis functions. The microactuator model incorporates the taper ratio, electrode shapes, and crack length, all of which govern the dynamic behavior of microactuators. To optimize the design of a microactuator, many characteristics of various shaped cantilevers and curved electrodes are also investigated.