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Mathematical Problems in Engineering
Volume 2012 (2012), Article ID 875641, 16 pages
http://dx.doi.org/10.1155/2012/875641
Research Article

Genetic Algorithm for Job Scheduling with Maintenance Consideration in Semiconductor Manufacturing Process

Department of Mechanical Engineering, University of Michigan, Ann Arbor, MI 48109, USA

Received 26 March 2012; Accepted 14 September 2012

Academic Editor: Joao B. R. Do Val

Copyright © 2012 Seungchul Lee and Jun Ni. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. R. Uzsoy, C. Y. Lee, and L. A. Martinvega, “A review of production planning and scheduling models in the semiconductor industry part I: system characteristics, performance evaluation and production planning,” IIE Transactions, vol. 24, no. 4, pp. 47–60, 1992. View at Publisher · View at Google Scholar
  2. R. Uzsoy, C. Y. Lee, and L. A. Martin-Vega, “Review of production planning and scheduling models in the semiconductor industry part II: shop-floor control,” IIE Transactions, vol. 26, no. 5, pp. 44–55, 1994. View at Google Scholar · View at Scopus
  3. Y. H. Lee, B. K. Lee, and B. Jeong, “Multi-objective production scheduling of probe process in semiconductor manufacturing,” Production Planning and Control, vol. 11, no. 7, pp. 660–669, 2000. View at Publisher · View at Google Scholar · View at Scopus
  4. P. Jula and R. C. Leachman, “Coordinated multistage scheduling of parallel batch-processing machines under multiresource constraints,” Operations Research, vol. 58, no. 4, part 1, pp. 933–947, 2010. View at Publisher · View at Google Scholar · View at Zentralblatt MATH
  5. W. M. Zuberek, “Cluster tools with chamber revisiting—modeling and analysis using timed Petri nets,” IEEE Transactions on Semiconductor Manufacturing, vol. 17, no. 3, pp. 333–344, 2004. View at Publisher · View at Google Scholar · View at Scopus
  6. T. W. Sloan and J. G. Shanthikumar, “Combined production and maintenance scheduling for a multiple-product, single-machine production system,” Production and Operations Management, vol. 9, no. 4, pp. 379–399, 2000. View at Google Scholar · View at Scopus
  7. P. G. Borden and L. A. Larson, “Benefits of real-time, in situ particle monitoring in production medium current implantation,” IEEE Transactions on Semiconductor Manufacturing, vol. 2, no. 4, pp. 141–145, 1989. View at Publisher · View at Google Scholar · View at Scopus
  8. X. Yao, M. Fu, S. I. Marcus, and E. Fernandez-Gaucherand, “Optimization of preventive maintenance scheduling for semiconductor manufacturing systems: models and implementation,” in Proceedings of the IEEE International Conference on Control Applications (CCA '01), pp. 407–411, September 2001. View at Scopus
  9. X. Yao, E. Fernández-Gaucherand, M. C. Fu, and S. I. Marcus, “Optimal preventive maintenance scheduling in semiconductor manufacturing,” IEEE Transactions on Semiconductor Manufacturing, vol. 17, no. 3, pp. 345–356, 2004. View at Publisher · View at Google Scholar · View at Scopus
  10. T. W. Sloan and J. G. Shanthikumar, “Using in-line equipment condition and yield information for maintenance scheduling and dispatching in semiconductor wafer fabs,” IIE Transactions, vol. 34, no. 2, pp. 191–209, 2002. View at Publisher · View at Google Scholar · View at Scopus
  11. A. S. Charles, I. R. Floru, C. Azzaro-Pantel, L. Pibouleau, and S. Domenech, “Optimization of preventive maintenance strategies in a multipurpose batch plant: application to semiconductor manufacturing,” Computers and Chemical Engineering, vol. 27, no. 4, pp. 449–467, 2003. View at Publisher · View at Google Scholar · View at Scopus
  12. A. Crespo Marquez, J. N. D. Gupta, and J. P. Ignizio, “Improving preventive maintenance scheduling in semiconductor fabrication facilities,” Production Planning and Control, vol. 17, no. 7, pp. 742–754, 2006. View at Publisher · View at Google Scholar · View at Scopus
  13. J. Hunter, D. Delp, D. Collins, and J. Si, “Understanding a semiconductor process using a full-scale model,” IEEE Transactions on Semiconductor Manufacturing, vol. 15, no. 2, pp. 285–289, 2002. View at Publisher · View at Google Scholar · View at Scopus
  14. T. Freed, K. H. Doerr, and T. Chang, “In-house development of scheduling decision support systems: case study for scheduling semiconductor device test operations,” International Journal of Production Research, vol. 45, no. 21, pp. 5075–5093, 2007. View at Publisher · View at Google Scholar · View at Zentralblatt MATH · View at Scopus
  15. S. M. Ross, Stochastic Processes, Probability and Statistics, John Wiley & Sons, New York, NY, USA, 2nd edition, 1996.
  16. J. Moyne and B. Schulze, “Yield management enhanced advanced process control system (YMeAPC) part I: description and case study of feedback for optimized multiprocess control,” IEEE Transactions on Semiconductor Manufacturing, vol. 23, no. 2, pp. 221–235, 2010. View at Publisher · View at Google Scholar · View at Scopus
  17. Y. Liu, Predictive modeling for intelligent maintenance in complex semiconductor manufacturing processes [Ph.D. thesis], University of Michigan, Ann Arbor, Mich, USA, 2008.
  18. M. C. Fu, “Optimization via simulation: a review,” Annals of Operations Research, vol. 53, no. 1, pp. 199–247, 1994. View at Publisher · View at Google Scholar · View at Zentralblatt MATH
  19. M. C. Fu, “Optimization for simulation: theory versus practice,” INFORMS Journal on Computing, vol. 14, no. 3, pp. 192–215, 2002. View at Publisher · View at Google Scholar
  20. M. Gen and R. Cheng, Genetic Algorithms and Engineering Design, John Wiley & Sons, New York, NY, USA, 1997.
  21. Z. M. Yang, D. Djurdjanovic, and J. Ni, “Maintenance scheduling for a manufacturing system of machines with adjustable throughput,” IIE Transactions, vol. 39, no. 12, pp. 1111–1125, 2007. View at Publisher · View at Google Scholar · View at Scopus
  22. L. Min and W. Cheng, “Genetic algorithms for the optimal common due date assignment and the optimal scheduling policy in parallel machine earliness/tardiness scheduling problems,” Robotics and Computer-Integrated Manufacturing, vol. 22, no. 4, pp. 279–287, 2006. View at Publisher · View at Google Scholar · View at Scopus
  23. I. Essafi, Y. Mati, and S. Dauzère-Pérès, “A genetic local search algorithm for minimizing total weighted tardiness in the job-shop scheduling problem,” Computers and Operations Research, vol. 35, no. 8, pp. 2599–2616, 2008. View at Publisher · View at Google Scholar · View at Zentralblatt MATH · View at Scopus
  24. M. L. Pinedo, Scheduling Theory, Algorithms, and System, Prentice Hall, Englewood Cliffs, NJ, USA, 2008.
  25. L. Min and W. Cheng, “A genetic algorithm for minimizing the makespan in the case of scheduling identical parallel machines,” Artificial Intelligence in Engineering, vol. 13, no. 4, pp. 399–403, 1999. View at Publisher · View at Google Scholar · View at Scopus