Vision Servo Motion Control and Error Analysis of a Coplanar Stage for Image Alignment Motion
Figure 12
The positioning repeatability of -axial motion of stage: (a) position of -axis when is at starting point; (b) position of -axis when is at end point; (c) starting point; (d) end point; (e) position of -axis when is at starting point; (b) position of -axis when is at end point.
