Table of Contents Author Guidelines Submit a Manuscript
Mathematical Problems in Engineering
Volume 2013, Article ID 608107, 8 pages
http://dx.doi.org/10.1155/2013/608107
Research Article

Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

1Mechanical Engineering Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia
2Mechanical Engineering Department, State University of New York at Binghamton, Binghamton, NY 13902, USA

Received 22 February 2013; Revised 6 July 2013; Accepted 30 July 2013

Academic Editor: Eihab M. Abdel-Rahman

Copyright © 2013 Hassen M. Ouakad and Mohammad I. Younis. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [5 citations]

The following is the list of published articles that have cited the current article.

  • Dumitru I. Caruntu, and Christian Reyes, “Rom of electrostatically actuated MEMS resonators under simultaneous resonances,” ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 4A, 2014. View at Publisher · View at Google Scholar
  • Dumitru I. Caruntu, and Christian Reyes, “Reduced order model of frequency response of superharmonic resonance of electrostatically actuated mems resonators,” ASME International Mechanical Engineering Congress and Exposition, Proceedings (IMECE), vol. 4, 2015. View at Publisher · View at Google Scholar
  • Amal Z. Hajjaj, Nouha Alcheikh, Abdallah Ramini, Md Abdullah Al Hafiz, and Mohammad I. Younis, “Highly Tunable Electrothermally and Electrostatically Actuated Resonators,” Journal of Microelectromechanical Systems, vol. 25, no. 3, pp. 440–449, 2016. View at Publisher · View at Google Scholar
  • Dumitru I. Caruntu, and Christian Reyes, “Voltage response of superharmonic resonance of electrostatically actuated mems resonator cantilevers using the method of multiple scales,” ASME 2016 Dynamic Systems and Control Conference, DSCC 2016, vol. 1, 2016. View at Publisher · View at Google Scholar
  • Hassen M. Ouakad, Fadi Alsaleem, and Mohammad H. Hasan, “On the effects of temperature and relative humidity on the response of a MEMS arch resonator,” Proceedings of the ASME Design Engineering Technical Conference, vol. 4, 2017. View at Publisher · View at Google Scholar