Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability

<table>Variation of the normalized fundamental natural frequency<svg height="11.925" id="M53" style="vertical-align:-3.27605pt" version="1.1" viewbox="0 0 22.975 11.925" width="22.975" xmlns="http://www.w3.org/2000/svg" xmlns:xlink="http://www.w3.org/1999/xlink">
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<g transform="matrix(.012,-0,0,-.012,16.575,11.863)"><path d="M384 0h-275v27q67 5 81.5 18.5t14.5 68.5v385q0 38 -7.5 47.5t-40.5 10.5l-48 2v24q85 15 178 52v-521q0 -55 14.5 -68.5t82.5 -18.5v-27z" id="x31"></path></g>
</svg> with the uniform temperature variation without the stretching effect.</table>

Mathematical Problems in Engineering

fig11

Figure 11

Figure 11: Modeling the Structural-Thermal-Electrical Coupling in an Electrostatically Actuated MEMS Switch and Its Impact on the Switch Stability 